CAD for silicon anisotropic etching : Effect of etching products and diffusionTABATA, O.Sensors and materials. 1998, Vol 10, Num 7, pp 425-433, issn 0914-4935Article

Fast-response silicon flow sensor with an on-chip fluid temperature sensing elementTABATA, O.I.E.E.E. transactions on electron devices. 1986, Vol 33, Num 3, pp 361-365, issn 0018-9383Article

Digital compensated capacitive pressure sensor using CMOS technology for low-pressure measurementsNAGATA, T; TERABE, H; KUWAHARA, S et al.Sensors and actuators. A, Physical. 1992, Vol 34, Num 2, pp 173-177, issn 0924-4247Conference Paper

Two-axis detection resonant accelerometer based on rigidity changeTABATA, O; YAMAMOTO, T.Sensors and actuators. A, Physical. 1999, Vol 75, Num 1, pp 53-59, issn 0924-4247Article

A NEW CVD TECHNIQUE FOR THE PREPARATION OF TRANSPARENT CONDUCTING FILMSTABATA O; TANAKA T; WASEDA M et al.1980; OSAKA KOGYO GIJUTSU SHIKENSHO KIHO; ISSN 0472-142X; JPN; DA. 1980; VOL. 31; NO 3; PP. 183-188; BIBL. 6 REF.Article

Reduction of surface roughness and aperture size effect for etching of Si with XeF₂SUGANO, K; TABATA, O.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 6, pp 911-916, issn 0960-1317, 6 p.Article

LASER HEATING CVD TECHNIQUETABATA O; KIMURA S; TABATA S et al.1981; INTERNATIONAL CONFERENCE ON CHEMICAL VAPOR DEPOSITION. 8/1981/GOUVIEUX; USA; PENNINGTON NJ: THE ELECTROCHEMICAL SOCIETY; DA. 1981; PP. 272-274Conference Paper

The combined use of US and MR imaging for the diagnosis of masses in the parotid regionGOTO, T. K; YOSHIURA, K; CHIKUI, T et al.Acta radiologica (1987). 2001, Vol 42, Num 1, pp 88-95, issn 0284-1851Article

Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin filmsTSUCHIYA, T; TABATA, O; SAKATA, J et al.Journal of microelectromechanical systems. 1998, Vol 7, Num 1, pp 106-113, issn 1057-7157Article

Morphologic analysis of odontogenic cysts with computed tomographyYOSHIURA, K; HIGUCHI, Y; ARAKI, K et al.Oral surgery, oral medicine, oral pathology, oral radiology, and endodontics. 1997, Vol 83, Num 6, pp 712-718, issn 1079-2104Article

Characteristics of a silicon monolithic pressure-flow sensor for air-mass flow measurementsTABATA, O; INAGAKI, H; SUGIYAMA, S et al.Heat transfer. Japanese research. 1992, Vol 21, Num 8, pp 747-761, issn 0096-0802Article

Low resistivity indium tin oxide films deposited by unbalanced DC magnetron sputteringSHIN, S. H; SHIN, J. H; PARK, K. J et al.Thin solid films. 1999, Vol 341, Num 1-2, pp 225-229, issn 0040-6090Conference Paper

Electrolytes in erythrocytes of patients with depressive disordersKAMEI, K; TABATA, O; MUNEOKA, K et al.Psychiatry and clinical neurosciences (Carlton. Print). 1998, Vol 52, Num 5, pp 529-533, issn 1323-1316Conference Paper

Anisotropic etching of silicon in TMAH solutionsTABATA, O; ASAHI, R; FUNABASHI, H et al.Sensors and actuators. A, Physical. 1992, Vol 34, Num 1, pp 51-57, issn 0924-4247Conference Paper

Control of internal stress and Young's modulus of Si₃N₄ and polycrystalline silicon thin films using the ion implantation techniqueTABATA, O; SUGIYAMA, S; TAKIGAWA, M et al.Applied physics letters. 1990, Vol 56, Num 14, pp 1314-1316, issn 0003-6951Article

Monolithic pressure-flow sensorTABATA, O; INAGAKI, H; IGARASHI, I et al.I.E.E.E. transactions on electron devices. 1987, Vol 34, Num 12, pp 2456-2462, issn 0018-9383Article

Monolithic pyroelectric infrared image sensor using PVDF thin filmFUJITSUKA, N; SAKATA, J; MIYACHI, Y et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 237-243, issn 0924-4247Conference Paper

Reliability of ultrasonography and sialography in the diagnosis of Sjögren's syndromeYOSHIURA, K; YUASA, K; TABATA, O et al.Oral surgery, oral medicine, oral pathology, oral radiology, and endodontics. 1997, Vol 83, Num 3, pp 400-407, issn 1079-2104Article

Stafne's bone cavity : classification based on outline and content determined by computed tomographyARIJI, E; FUJIWARA, N; TABATA, O et al.Oral surgery, oral medicine, oral pathology. 1993, Vol 76, Num 3, pp 375-380, issn 0030-4220Article

Clinical symptoms of open lock position of the condyle : relation to anterior dislocation of the temporomandibular jointKAI, S; KAI, H; NAKAYAMA, E et al.Oral surgery, oral medicine, oral pathology. 1992, Vol 74, Num 2, pp 143-148, issn 0030-4220Article

On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tabletTSUJIMOTO, K; BAN, K; HIRAI, Y et al.Journal of micromechanics and microengineering (Print). 2013, Vol 23, Num 11, issn 0960-1317, 115003.1-115003.9Article

Hyper EN-Lite System for GMN-CL : Special issue on transmission systemsTABATA, O; NAKASATO, M; FUKUSHIGE, M et al.NEC research & development. 1999, Vol 40, Num 1, pp 80-90, issn 0547-051XArticle

Long-term outcomes of nonsurgical treatment in nonreducing anteriorly displaced disk of the temporomandibular jointKAI, S; KAI, H; TABATA, O et al.Oral surgery, oral medicine, oral pathology, oral radiology, and endodontics. 1998, Vol 85, Num 3, pp 258-267, issn 1079-2104Article

Study on fabrication of high aspect ratio MEMS microparts using a compact SR beamlineSUGIYAMA, S; ZHANG, Y; HOSAKA, M et al.Microsystem technologies. 1998, Vol 4, Num 2, pp 61-63, issn 0946-7076Article

Dependence of the hardness of titanium nitride prepared by plasma chemical vapour deposition on the gas flow rate and the r.f. powerMAKABE, R; NAKAJIMA, S; TABATA, O et al.Thin solid films. 1986, Vol 137, Num 1, pp L49-L50, issn 0040-6090Article